Zarchi M, Ahangarani S. A Comparison between Thin-Film Transistors Deposited by Hot-Wire Chemical Vapor Deposition and PECVD. Metall Mater Eng [Internet]. 2015 Mar. 31 [cited 2026 Jul. 15];21(1):7-14. Available from: https://www.metall-mater-eng.com/index.php/home/article/view/128